Microspot exposure microscope
Ultraviolet light inspection can be performed in a microscopic area.
The micro spot exposure microscope is a high-precision review inspection microscope for mask defects that can perform slit exposure on small areas of the screen. It places a mask coated with resist on a stage, automatically reproduces the defect positions from the defect inspection machine's data, determines the exposure range with an XY slit, and uses a timer to expose with a mercury spectrum in a spot irradiation microscope. For more details, please download and view the catalog.
- 企業：アイティ・テック
- 価格：Other
